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Case Studies ::
Semiconductor Industry
Solutions ::
Power Supply
SYSMAC SPU Enables
Capturing of Machine Characteristics to Allow for Faster
System Start-up
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Omron's
Product: |
• CJ1W-SPU01
Storage and Processing Unit
•
WS02-EDMC1
Data Management Software
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An SPU enables high-speed collection of data with time
stamp without affecting the process control.
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The collected data can be updated into computer
automatically.
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It can not only monitor the accumulated process data but
also enable root cause analysis and operational tendency
understanding.
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Advantages of
Data Collection for Equipment and Facilities
Features of a
System Using the SYSMAC SPU
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Data or bit signals can be read
from devices (e.g., MFC or RF power supplies) in equipment via
DeviceNet or using a PLC Unit to reliably collect data at high
speed with a SYSMAC SPU. Making the required settings is
simple.
• Data format can be created
freely for the collection data taking into account the link
with the host.
• The collected data is
transferred to the host for each wafer process and each lot.
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